Fa'aaogāga
All-in-one design, smart structure and shape.Scan head and sample stage are designed together, strong anti-vibration performance .Precision laser detection and probe alignment masini faia leisa fetuunaiga faigofie ma easy.Adapt servomotor e tulia le faataitaiga latalata pito lima. po o le otometi, ia iloa sa'o su'esu'ega nofoaga positioning.High-saʻo ma tele tele vaega faʻafeiloaʻi masini faʻatagaina e matamata i soʻo se vaega manaia o faʻataʻitaʻiga ;Ituaiga eseese o le scanner e fetaui ma manaoga o tagata faatau i le saʻo ma le tele o le mataʻituina; positioning.CCD mataʻituina faiga mo le taimi moni eria faataitaiga mataituina ma tulaga;Faaaoga servomotor e ausia CCD auto-taulai faiga faaeletonika ua mamanuina e modular ma faigofie mo le tausiga ma atinae.Integrated ma le tele o auala galue pulea faaeletonika mo le atinae atili.
Vaega Autu
1. Fa'ata'ita'i le ulu ma le fa'ata'ita'iga fa'ata'ita'iga ua fa'atulagaina fa'atasi, malosi le fa'atinoina o le vibration
2. Sa'o leisa su'esu'ega ma su'esu'e alignment masini faia leisa fetuunaiga faigofie ma faigofie;
3. Fetuuna'i le servomotor e tulia ai le fa'ata'ita'iga fa'alatalata pito i luga ma le lima po'o le otometi, e iloa ai le sa'o o le su'esu'eina o le tulaga o le nofoaga.
4. Sa'o maualuga ma le tele o masini fa'afeiloa'iga fa'ata'ita'iga e mafai ai ona va'ai so'o se vaega manaia o fa'ata'ita'iga;
5. Fa'atonuga mata'ituina mo le siaki pito ma le fa'atulagaina o fa'ata'ita'iga.
6. Faiga fa'aeletonika ua mamanuina fa'apitoa ma faigofie mo le tausiga ma fa'alautele atili.
7. Faʻaaogaina le tautotogo mo le vavaeeseina o le vibration, faigofie ma lelei le faʻatinoga.
Fa'amatalaga
Fa'agaioiga | Faiga fa'afeso'ota'i, faiga fa'afefe, | Su'e su'ega | Fa'afuase'i |
Tele fa'ata'ita'iga | Ø≤90mm,H≤20mm | Fa'ata'ita'iga gaioiga | 0~20mm |
Max.su'esu'e | X/Y: 20μm, Z: 2μm | Pulse lautele o le afi latalata | 10±2ms |
I'ugafono | X/Y: 0.2 nm, Z: 0.05nm | Optical system | Fa'atele: 4x, |
Fa'asolo fua | 0.6Hz~4.34Hz | Fa'amatalaga fa'amatalaga | 256×256,512×512 |
Va'aiga | XY: 18-bit D/A, Z: 16-bit D/A | Ituaiga manatu faaalia | DSP fa'amatalaga numera |
Fa'ata'ita'iga o fa'amaumauga | Tasi le 14-bit A/D ma le faaluaina le 16-bit A/D tele-auala i le taimi e tasi | ||
So'oga PC | USB2.0 | Fa'amatalaga fa'ata'ita'iga fua faatatau | 64.0KHz |
Pupuni | E fetaui ma le Windows 98/2000/XP/7/8 |
Tulaga
GB/T 2985-1991
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